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當(dāng)前位置:首頁  >  技術(shù)文章  >  半導(dǎo)體行業(yè)微量氧分析儀的自主研發(fā)與技術(shù)創(chuàng)新

半導(dǎo)體行業(yè)微量氧分析儀的自主研發(fā)與技術(shù)創(chuàng)新

更新時(shí)間:2025-11-14      點(diǎn)擊次數(shù):336

一、半導(dǎo)體制造中氧監(jiān)測(cè)的重要性與難點(diǎn)

在半導(dǎo)體制造過程中,氧污染會(huì)引發(fā)不必要的氧化反應(yīng),導(dǎo)致集成電路和硅片產(chǎn)生缺陷,進(jìn)而破壞薄膜結(jié)構(gòu)的完整性,嚴(yán)重影響產(chǎn)品的均勻性與可靠性。因此,半導(dǎo)體制造商必須對(duì)工藝氣體及設(shè)備腔室中的氧含量進(jìn)行嚴(yán)格監(jiān)控,即便是微量氧氣(低至ppm級(jí))也可能顯著損害元件性能。

目前,半導(dǎo)體工藝氣體中的氧監(jiān)測(cè)主要面臨以下技術(shù)難點(diǎn):

在眾多氣體檢測(cè)技術(shù)中,氧化鋯傳感器分析技術(shù)因其響應(yīng)速度快、測(cè)量精度高、量程范圍廣、穩(wěn)定性強(qiáng)及使用壽命長(zhǎng)等優(yōu)勢(shì),成為半導(dǎo)體行業(yè)氧濃度監(jiān)測(cè)的理想選擇。

另一方面,實(shí)現(xiàn)該類儀器的國(guó)產(chǎn)化已成為國(guó)家戰(zhàn)略層面的迫切需求。目前微量氧分析設(shè)備仍主要依賴歐美日進(jìn)口。根據(jù)2025年《政府工作報(bào)告》的要求,突破關(guān)鍵核心技術(shù)、推動(dòng)國(guó)產(chǎn)替代,對(duì)保障產(chǎn)業(yè)鏈安全具有重大意義。


二、四方儀器的解決方案與創(chuàng)新實(shí)踐

四方儀器長(zhǎng)期專注于氧化鋯傳感器及氣體分析儀的研發(fā)與推廣。為滿足半導(dǎo)體及電子行業(yè)對(duì)低濃度氧氣檢測(cè)日益提升的需求,公司成功開發(fā)出Gasboard-3050系列低濃度氧氣分析儀。該系列產(chǎn)品分辨率達(dá)0.1 ppm,量程覆蓋0–10 ppm至100% O?,搭載經(jīng)現(xiàn)場(chǎng)驗(yàn)證的氧化鋯傳感器,具備優(yōu)異的再現(xiàn)性與高速響應(yīng)特性。

1.png

圖1 四方光電氧化鋯傳感器生產(chǎn)線及不同類型氧化鋯傳感器芯片產(chǎn)品

2.1 氧化鋯氧傳感器工作原理

氧化鋯是一種優(yōu)良的固體電解質(zhì)材料。傳統(tǒng)氧化鋯氧傳感器由多孔高溫陶瓷電解質(zhì)管構(gòu)成,管內(nèi)外壁均涂覆多孔鉑層,分別作為陰極和陽極。傳感器內(nèi)置高性能陶瓷加熱器與熱電偶探頭,共同維持可控的高溫環(huán)境(通常為650℃)。

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圖2 氧化鋯氧傳感器原理圖

當(dāng)溫度達(dá)到工作點(diǎn)時(shí),氧化鋯內(nèi)的氧離子變得高度活躍,可快速遷移以平衡兩側(cè)氧分壓差。若兩側(cè)氧分壓不同,便會(huì)在電極間產(chǎn)生電位差,其大小符合能斯特方程:

?image.png

其中,E為電動(dòng)勢(shì)(V),R為氣體常數(shù),T為絕對(duì)溫度(K),F(xiàn)為法拉第常數(shù),P?和P?分別為兩側(cè)氧分壓。


2.2 Gasboard-3052微量氧分析儀

該型號(hào)采用遠(yuǎn)程原位傳感器設(shè)計(jì),特別適用于需持續(xù)監(jiān)測(cè)氧濃度的場(chǎng)景,如半導(dǎo)體設(shè)備、手套箱、氮?dú)夤芫€、真空腔體及其他低氧/無氧環(huán)境。傳感器可直接通過真空接頭安裝于真空腔體,廣泛用于半導(dǎo)體制造、OLED生產(chǎn)、3D打印等使用惰性氣體的工業(yè)場(chǎng)合。其氧化鋯傳感器壽命長(zhǎng)、穩(wěn)定性高,在適當(dāng)維護(hù)條件下可多年免更換。

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圖3 Gasboard-3052微量氧分析儀

產(chǎn)品主要特點(diǎn):

• 量程:0.1 ppm~1000 ppm,覆蓋多數(shù)半導(dǎo)體真空腔體監(jiān)測(cè)需求;

• 法蘭接口,即插即用;

• 長(zhǎng)效低溫氧化鋯傳感器;

• 支持真空環(huán)境運(yùn)行;

• 泄漏率<1×10?? mbar·L/s。


2.3 Gasboard-3053氧分析儀

該型號(hào)為抽取集成式設(shè)計(jì),整合了寬量程氧化鋯傳感器、前處理單元和采樣泵,適用于除真空腔體外的多種應(yīng)用場(chǎng)景,如SMT工藝中的回流焊爐等。

4.png

圖4 Gasboard-3053 氧分析儀

產(chǎn)品主要特點(diǎn):

• 量程范圍寬:0.1 ppm~100%,適應(yīng)濃度波動(dòng)大的場(chǎng)合;

• 壓力變化自適應(yīng):內(nèi)置壓力傳感器,可補(bǔ)償氣體壓力微小變化,保證讀數(shù)穩(wěn)定;

• 適用于還原性氣氛:當(dāng)樣品含可燃物時(shí),鉑催化劑確保氣體在接觸電極前達(dá)到平衡,從而準(zhǔn)確測(cè)量總氧含量。


3. 典型應(yīng)用場(chǎng)景

四方儀器Gasboard-3050系列可滿足半導(dǎo)體及相關(guān)領(lǐng)域絕大多數(shù)氧濃度監(jiān)測(cè)需求,典型應(yīng)用包括但不限于:


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